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AMHS for Semiconductor Fab. [High Density Reticle Stocker CDRX]

AMHS for Semiconductor Fab.

High Density Reticle Stocker CDRX(Clean Depot Reticle/POD Stocker)

With shrinking design nodes, Reticle protection is required to reduce haze and crystal growing. CDRX is a combination storage system to store Reticle and Pod separately. It prevents the Reticle haze and the crystal growing by use of CDA and N2 Purging. In addition, the optional Anti-Seismic Function will guard Reticles from the breakage in case of earthquake.

CDRX(Clean Depot Reticle/POD Stocker)

Cycle Time(s)

Input 60 sec.

Reticle Storage (Purging)

1,920 cells

POD Storage
(Purging Option)

60 PODs

Reticle Storage by

Patented Reticle Storage Cell

Storage Cleanliness

ISO CLASS 1

Anti-Seismic Function (Option)

SN:633gal, EW786gal
(The Great East Japan Earthquake Requirements)

High Density Reticle Stocker CDRX
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