Tool Front FOUP Buffer Tool Station TS300
It is buffer equipment to be set over the load port of the process equipment. Tool Station can be set up on either new or existing production line where the equipment complies with E15.1 SEMI Standard. Carriers (FOUP) can be buffered at the nearest position to the process equipment. Additionally, by setting up independent transfer units at each process equipment, it is possible to reduce the FOUP replacement time between the FOUP removal after process completion and FOUP supply to the next process, enabling improvement in the operation efficiency of the inspection equipment which takes short time to inspect.
- Maximum configurations 4 bays x 3 Levels for temporary storage