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AMHS for Semiconductor Fab. [OHS]

AMHS for Semiconductor Fab.

OHS

An automated overhead transport system where the transport vehicle travels on the overhead track to transfer a carrier. "OHS" is the abbreviation for OverHead Shuttle. As it is mainly used for transporting carriers between allocated storage facilities, such as stockers at manufacturing process units for coating and cleaning, it is also called as "inter-bay transport system".

OHSOHS
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