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AMHS for Semiconductor Fab. [AGV]

AMHS for Semiconductor Fab.

AGV

An automated transport system equipped with SCARA robot arm, that travels on the floor to "directly" access stocker and process equipment. "AGV" is the abbreviation for Automated Guided Vehicle. The vehicles travel flexibly on complex routes through a high-accuracy navigation system to transport carriers to the process equipment.

AGV
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