A temporary storage shelf within the Clean room to absorb a deviation in timing between the process completion on the process equipment and start of process on the next process equipment. We at Muratec Automation Co., Ltd. can provide a wide range of storage solutions to meet your needs, like stocker for storing carrier (FOUP or RSP), buffer before the process equipment (TS300) or Reticle stocker with high density storage or purge capability (CDRX).

Buffer over the load port of the process equipment. "TS300" is abbreviation for Tool Station 300. Can be set up on a new line or existing line where the equipment complies with E15.1 SEMI Standard. Carriers (FOUP) can be buffered at the nearest position to the process equipment. Additionally, by setting up independent transfer units at each process equipment, it is possible to reduce the FOUP replacement time between the FOUP removal after process completion to FOUP supply at the next process, enabling improvement in the operation efficiency of the inspection equipment by reduced inspection time.

CDRX is a combination storage system to store the Reticle glass and POD separately. The Reticle glass is stored in the isolated safe state away from the particle and the chemical pollution by unique topical clean technology, and which cuts out the HAZE problem which has been a recent issue in many factories.