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AMHS for FPD Fab.

Stocker

Stacker crane stores and retrieves cassettes for big size FPD panel from the stocker smoothly and stably ensuring the quality of the glass panel through low vibration and controlling particle emission. An advanced motion control system is used to achieve high speed through smooth acceleration and deceleration. We have a clean room (C10@0.3 microns) at our Inuyama factory for simulating the customer's Fab environment. In addition to simulation of temperature and air flow, it is possible to verify the particle generation state and effect on air flow caused by the transport or transfer operation in a state close to the state of the actual factory where system will be installed to maintain or improve product quality.
StockerStocker
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