
- Shorten conveyance lead times.
- Increase reliability at the system and mechanical levels.
- Particle measurement.

- By directly linking the manufacturing equipment with the clean depot, you can position equipment in-line which aids Q-TAT.
- Using RGV (rail guided vehicles) increases the speed of in-process conveyance.

Clean Depot Systems
- Supports transport for 7th generation glass, and warehouse clean degree of up to 0.3 Class.
Details
Rail Guided Vehicles (RGV)
- Simple configuration, high-speed operation, and high-speed transfer with high reliability.
Details
Murata AMHS Control System (MACS)
- Host computer (MACS) issues the commands to each conveyance device and controls and monitors the status of these devices.
*MACS - Murata AMHS Control System Abbreviation
Details
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